Abstract

Surface Acoustic Wave (SAW) devices, using interdigital electrodes, play a key role in
today’s telecommunication systems and are widely used as electronic filters, resonators,
delay lines, convolvers or wireless identification systems (ID tags).
During the last three decades, demands set by the expansion of the telecommunication
industry and many applications in sensor have resulted in the introduction of a new
generation of the SAW devices. Consequently, the design of high performance SAW devices
requires precise and efficient models, simulation tools. Several methods have been proposed
for modeling, analyzing SAW devices. These include the impulse model, the equivalent
circuit models, the coupling-of-mode (COM) model, P-matrix model, angular spectrum of
waves models [1] and the Scattering Matrix approach that was presented by Coldren and
Rosenberg [2]. While the impulse model is only a first order model, the other models
include second order effects, e.g. reflections, dispersion, and charge distribution effects.
Purely numerical methods have also been and are being developed by many authors [3]-
[35], [41].
In this chapter, the method for calculating the SAW parameters, including modeling and
simulation, is given.
Section 2 gives the calculation of SAW properties and analyses of different SAW device
structures.
Section 3 presents the equivalent circuit of SAW delay line based on Mason model.
The equivalent circuit of SAW delay line based on Couple-Of-Mode theory is presented in
section 4.
Based on section 3 and 4, section 5 shows comparison between using the equivalent circuit
of SAW delay line device based on Mason model and COM theory. This model is useful and
fast model for designing the SAW device.